Introduction to Products

ATRM-4000　

FEATURES

  • Protective tape remover for 12-inch (300 mm) wafers.
  • Partition between the wafer cassette and maintenance section minimizes the space for a clean room by putting the maintenance section outside the clean room.
  • Holding a wafer precisely with a unique wafer table and removing the protective tape without giving stress.
  • Interactive mode allows easier operation.
  • (Option) FOUP cassette, AGV and OHT protocol, built-in UV radiation unit.

Online Catalog

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