Introduction to Products

ATM-3100　

FEATURES

  • Protective tape laminator for 12-inch (300 mm) wafers.
  • Partition between the wafer cassette and maintenance section minimizes the space for a clean room by putting the maintenance section outside the clean room.
  • Consideration for weight saving helps an operator from big burden.
  • Designed that tape is replaceable at the backside of the machine for easy management.
  • Interactive mode allows easier operation.
  • (Option) FOUP cassette, AGT and OHT protocol.

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